Recent advances in quantum technology and hardware have advanced MEMS systems to where these can now be designed and operated in the quantum regime, albeit using sophisticated quantum methods to control and measure the mechanics, and requiring cryogenic systems to enable operation in the quantum ground state. Quantum MEMS promise exciting new opportunities for applications in quantum information processing and storage, and for quantum sensing. Applications are particularly relevant to superconducting qubits, which provide a high fidelity, scalable platform for information processing but are lacking a compact means for quantum information storage. Superconducting qubits integrate easily with mechanical devices through the use of piezoelectric materials, and combined with the recent demonstration of ultrahigh quality factor, microwave-frequency mechanical devices points to fascinating opportunities for sub-mm scale memories and sensors. I will discuss the current state-of-the-art for integrating superconducting qubits with mechanical devices, focusing on operation of MEMS resonators and surface acoustic wave devices operating at the single phonon limit. I welcome discussion following my talk regarding future prospects for this novel technology.